测量未抛光晶圆粗糙度

PicoStation高速多模式3D光学轮廓仪测量未抛光晶圆粗糙度，得益于高速压电扫描技术和GPU并行图像计算，仅在几百毫秒内就可获得晶圆粗糙表面形貌，可计算Sa/Sq/Sal/Ssk和Sku等ISO 25178面粗糙度参数。

PicoStation high-speed multi-mode 3D optical profilometer is designed for precise measurement of wafer surface roughness prior to polishing. Leveraging advanced high-speed piezoelectric scanning technology and GPU-accelerated parallel image processing, it delivers detailed surface topography within a few hundred milliseconds. The system supports the computation of ISO 25178-compliant surface roughness parameters, including Sa, Sq, Sal, Ssk, and Sku.