PicoStation半导体行业应用-光谱共焦传感器_三维表面形貌测量_白光干涉仪-聆光测量官方网站

PicoStation半导体行业应用

首页    新闻中心    PicoStation半导体行业应用

芯片制造是当前尖端制造领域之一,量产工艺已达到3nm节点。利用PicoStation系统进行制程品质控制,其分辨率高达0.01nm,支持多视场拼接测量,能够精确计算台阶高度、表面粗糙度及翘曲度。

 

Chip manufacturing is one of the leading fields in advanced manufacturing today, with mass production processes reaching the 3nm node. The PicoStation system is used for process quality control, offering a resolution of up to 0.01nm. It supports multi-field stitching measurements and can accurately calculate step height, surface roughness, and warp.

 

2024年11月13日 14:14