测量的高精度和大视野可以兼得吗？

3D光学轮廓仪的单次测量区域都较小，XY通常仅有几百微米，如果要测量更大的区域该如何解决？PicoStation提供高精度拼接功能，将单视野数据通过阵列的方式组合起来，以获得更完整的表面数据。分享一组数据由PicoStation 变焦扫描10*12阵列拼接而成，XY幅面大小为5.97*3.86mm。计算参数可包括平面度、翘曲度、BOW、Wrap、台阶高度和粗糙度等。

3D optical profilometers typically have small measurement areas, with XY dimensions often limited to a few hundred micrometers. How can larger areas be measured? PicoStation provides a high-precision stitching function, combining single-field data into an array to obtain more complete surface data. Here is a dataset formed by stitching a 10x12 array of zoom scans from PicoStation, with an XY field of view size of 5.97x3.86 mm. The calculated parameters include flatness, warp, BOW, wrap, step height, roughness, and more.